Ibaraki University's
College of Engineering
Department of Materials Science and Engineering

Lecturer

NAGANO Takatoshi

  • Birth:1973

Career

  1. 明治大学情報処理科学センター プログラム相談員 1996/04-1999/03
  2. 明治大学理工学部機械情報工学科 設計・CAD 教育補助 1996/04-1999/03
  3. 法政大学第二教養兼任助手 1999/04-2000/03
  4. 明治大学理工学部専任助手 1999/04-2002/03
  5. 武蔵大学経済学部兼任講師 2000/10-2002/03

Academic background

  1. Meiji University Graduate School, Division of Science and Engineering 機械工学

Academic degrees

  1. 修士(工学) Meiji University
  2. 博士(工学) Meiji University

Papers

  1. Research paper (scientific journal) Joint Screening of Undesirable Elements Raising the Electrical Resistivity in Very Narrow Cu Wires by Ab Initio Calculation Takatoshi Naganoz, Kunihiro Tamahashi, Takashi Inami, Yasushi Sasajima, Jin Onuki Journal of The Electrochemical Society The Electrochemical Society 164/ 9, D558-D563 2017/07/05 10.1149/2.0621709jes We estimated segregation energy for compound impurities at the grain boundary in very narrow Cu wires using the ab initio calculation. From the calculation results, we clarified that the impurities such as FeO, Fe(ClO), TiO and Ti(ClO) have a strong segregation tendency at the Cu grain boundaries. The FE-TEM observation results of the Cu wires with Fe impurity atoms confirmed that the impurity atoms led to smaller grain sizes than the impurity-free case. The resistivity was measured as a function of the Cu wire width for various Fe impurity concentrations and the wire resistivity became higher with increased impurity concentration.
  2. Research paper (scientific journal) Joint 第一原理計算によるAl–Zn–Mg合金中の水素の存在位置の解析 永野 隆敏, 篠嶋 妥, 伊藤 吾朗 軽金属 一般社団法人 軽金属学会 66/ 7, 339-344 2016/08/30
  3. Research paper (scientific journal) Joint Pinning Effect of Fe(ClO) and Ti(ClO) Compounds on Cu Grain Growth in Very Narrow Cu Wires Takatoshi Nagano, Yasushi Sasajima, Nobuhiro Ishikawa, Kunihiro Tamahashi, Kishio Hidaka and Jin Onuki ECS Electrochemistry Letters 4/ 11, D1-D5 2015
  4. Research paper (scientific journal) Joint Search for Barrier Materials for Cu Interconnects in Integrated Circuits Yasushi Sasajima, Yuki Kimura, Tetsunori Tsumuraya, Takatoshi Nagano and Jin Onuki ECS J. Solid State Sci. Tech. 2, 351-356 2013
  5. Research paper (scientific journal) Joint Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect Takatoshi Nagano,z Kunihiro Tamahashi, Yasushi Sasajima, and Jin Onuki ECS Electrochemistry Letters 2/ 6, H23-H25 2013/03/09 10.1149/2.001306eel

Research presentations

  1. Oral presentation(general) 第一原理計算によるAl-Zn-Mg合金中の水素の存在位置の解析 軽金属学会 講演大会 第131回秋期大会 2016/11/06
  2. Oral presentation(invited, special) 材料開発における界面や表面を扱ったナノレベルシミュレーションとその有用性について 軽量化技術研究室・2011年度前期研究発表会 2011/08/17
  3. Oral presentation(general) ab initio calculation of surface for β-FeSi2 第13回シリサイド系半導体研究会 2009/04/03 β-FeSi2 (101)表面における電子密度分布を計算し、どのような構造が表面として安定化を、第一原理計算により推測した。

Intellectual property rights

  1. Patent 半導体集積回路装置用Ruバリア膜 特願2011-33019 2011

Prizes

  1. 日本鉄鋼協会 秋季講演大会学生ポスターセッション優秀賞 Ab initio Calculation of Interfacial Energies and Structure for Fe/TiC(Baker-Nutting) 2008/09/24

Alloted class

  1. 計算材料学基礎
  2. 第一原理計算特論Ⅰ
  3. 情報処理概論
  4. 第一原理計算特論Ⅱ

Memberships of academic societies

  1. 日本鉄鋼協会
  2. The Japan Institute of Metal
  3. 軽金属学会 2016/01-Present
  4. the Japan Society of Applied Phisics 2008/08-Present

Committee Career

  1. The Japan Institute of Metal 編集委員 2011/04/01-2013/03/31